The Japan Society of Applied Physics

[PS-4-05] First-Principles Study for Orientation Dependence of Band Alignments at 4H-SiC/SiO2 Interface

Shun - Matsuda1, Toru - Akiyama1, Tetsuo - Hatakeyama2, Kenji - Shiraishi3, Takashi - Nakayama4 (1. Mie Univ. (Japan), 2. Toyama Pref. Univ. (Japan), 3. Nagoya Univ. (Japan), 4. Chiba Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-4-05

We theoretically investigate the surface orientation dependence of band alignments and dipole formation at 4H-SiC/SiO2 interfaces on the basis of first-principles calculations. The calculations demonstrate that the offsets of valence and conduction bands depends on the orientation and chemical bonds at the interface. The conduction band offset on the Si-face interface is larger than those on the C-face and m-face interfaces. Furthermore, it is found that the dipole formation due to Si-O and C-O bonds significantly changes the band structure of 4H-SiC, resulting in large conduction bands offset. The formation of Si-O bond at the interface is of importance for obtaining large conduction band offset, leading to higher reliability in SiC metal-oxide-semiconductor field-effect transistors.