The Japan Society of Applied Physics

[PS-5-03] Anti-relaxation of Tensile Lattice Strain in Si-Embedded Ge Strip Structure for Photonic Device Applications

Joshua Chombo1, Mohd Faiz Bin Amin1, Jose A. Piedra-Lorenzana1, Takeshi Hizawa1, Keisuke Yamane1, Mingjun Jiang2, Donghwan Ahn2, Kazumi Wada3, Yasuhiko Ishikawa1 (1. Toyohashi Univ. of Tech. (Japan), 2. Kookmin Univ. (Korea), 3. MIT (United States of America))

https://doi.org/10.7567/SSDM.2023.PS-5-03

Anti-relaxation or preservation of the tensile lattice strain is presented in a narrow Ge strip on Si epitaxially grown by chemical vapor deposition, regarding efficient near-infrared photodetection and light emission in Si photonics. In contrast to an edge-induced relaxation of a tensile strain in an ordinary Ge strip as narrow as a few microns or below, a tensile strain as high as 0.2% is not relaxed but preserved by embedding the strip entirely in Si.