The Japan Society of Applied Physics

2:04 PM - 2:06 PM

[SO-PS-02-18] Capacitorless DRAM Based on Polycrystalline-Silicon with a Separated Channel Layer and a Fin-Shaped Storage Layer

Seung Ji Bae1, Sang Ho Lee1, Jin Park1, Ga Eon Kang1, Jun Hyeok Heo1, So Ra Jeon1, Min Seok Kim1, Jeong Woo Hong1, Jaewon Jang1, Jin-Hyuk Bae1, Sin-Hyung Lee1, In Man Kang1 (1. Kyungpook National Univ. (Korea))

In this study, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) based on a polycrystalline silicon metal-oxide-semiconductor field-effect transistor with a separated channel layer and a fin-shaped storage layer was proposed and analyzed. The memory performance is improved by a fin-shaped storage layer and a region separated into a channel layer and a storage layer. The proposed 1T-DRAM achieved the high sensing margin of 19.09 μA/μm and the long retention time of 525 ms at T = 358 K.