The Japan Society of Applied Physics

2:06 PM - 2:08 PM

[SO-PS-02-19] Effect of Geometrical Variations on Bulk FinFET-Based Capacitorless DRAM

Min Seok Kim1, Sang Ho Lee1, Jin Park1, Ga Eon Kang1, Jun Hyeok Heo1, So Ra Jeon1, Jeong Woo Hong1, Seung Ji Bae1, In Man Kang1 (1. Kyungpook National Univ. (Korea))

In this paper, the bulk fin-type field-effect transistor (FinFET)-based the capacitorless one-transistor dynamic random access memory (1T-DRAM) is proposed and analyzed. We have studied the transfer characteristics and the memory performances of the bulk FinFET-based 1T-DRAM depending on the geometrical variations such as the fin angle (θFin) variation and the line edge roughness (LER). Consequently, we discovered that the geometrical variations affected the transfer characteristics of the bulk FinFET.