The Japan Society of Applied Physics

1:38 PM - 1:40 PM

[SO-PS-04-05] First-Principles Study for Orientation Dependence of Band Alignments at 4H-SiC/SiO2 Interface

Shun - Matsuda1, Toru - Akiyama1, Tetsuo - Hatakeyama2, Kenji - Shiraishi3, Takashi - Nakayama4 (1. Mie Univ. (Japan), 2. Toyama Pref. Univ. (Japan), 3. Nagoya Univ. (Japan), 4. Chiba Univ. (Japan))

We theoretically investigate the surface orientation dependence of band alignments and dipole formation at 4H-SiC/SiO2 interfaces on the basis of first-principles calculations. The calculations demonstrate that the offsets of valence and conduction bands depends on the orientation and chemical bonds at the interface. The conduction band offset on the Si-face interface is larger than those on the C-face and m-face interfaces. Furthermore, it is found that the dipole formation due to Si-O and C-O bonds significantly changes the band structure of 4H-SiC, resulting in large conduction bands offset. The formation of Si-O bond at the interface is of importance for obtaining large conduction band offset, leading to higher reliability in SiC metal-oxide-semiconductor field-effect transistors.