The Japan Society of Applied Physics

13:44 〜 13:46

[SO-PS-05-08] Enhancement of broadband ZnO nanorods photosensing capability by incorporating Nanoimprinted lithography grating nanostructures

Chun Yen Yang1, Bo Hong Lin2, Jyun Jie Chen1, Chun Hung Lin2, Ming Yu Kuo1, Ming Hsien Li1, Hsiang Chen1 (1. National Chi Nan Univ. (Taiwan), 2. National Cheng Kung Univ. (Taiwan))

This study investigates the use of zinc oxide (ZnO)-based photodetectors (PDs) with grating structures of ZnO nano-rods (NRs) fabricated using nanoimprinted lithography (NIL). The wide bandgap of ZnO makes it primarily absorb ultraviolet (UV) light, limiting its response to visible light. Results show that PDs with NIL ZnO NRs exhibit significant photoresponse to red light (600 nm), while PDs with regular ZnO NRs do not respond. The use of NIL and oxygen plasma treatment reduces oxygen vacancy defects, allow-ing the ZnO structure to efficiently absorb energy from the red light source and improve photodetection response. These findings suggest promising applications for ZnO-based photosensing devices