The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

Sep 5, 2023 - Oct 31, 2023
Nagoya Congress Center

1:48 PM - 1:50 PM

[SO-PS-10-10] Impact of Post-growth Slow-cooling Process on the Growth of Rocksalt-structured MgZnO Films by Mist CVD

○Kotaro Ogawa1, Wataru Kosaka1, Hiroya Kusaka1, Yuichi Ota2, Tomohiro Yamaguchi1, Tohru Honda1, Kentaro Kaneko3, Shizuo Fujita4, Takeyoshi Onuma1 (1. Kogakuin Univ. (Japan), 2. Tokyo Metropolitan Industrial Technology Research Inst. (Japan), 3. Ritsumeikan Univ. (Japan), 4. Kyoto Univ. (Japan))

Rocksalt-structured MgxZn1-xO films with x=0.65-0.97 were grown on MgO (100) substrate by mist chemical vapor deposition method. By employing post-growth slow-cooling to suppress thermal stress, small full width at half maximum (FWHM) values of 61-202 arcsec were achieved for 200 diffraction peak in θ-2θ X-ray diffraction profiles. FWHM values in XRC for 200 diffraction were 48 to 317 arcsec, in which the smallest one was even smaller than that of MgO substrate of 57 arcsec. Cathodoluminescence spectra showed near-band-edge emission peaks in 190 nm spectral range for MgO molar fraction x>0.92 at 300 K.