[A202-4pm] 19. Colloid and Interface Chemistry

[A202-4pm-10] Wet etching of silicon surface using arranged monolayer of polystyrene particle as two-dimensional template

^○Shota Otogawa¹, Ken-ichi Iimura¹ (1. Utsunomiya University)

[Lang.] Japanese

Keywords:monoparticle film, polystyrene fine particles, spreading technique, Langmuir trough, wet etching