[12p-P17-1~7] 15.5 Group IV crystals and alloys

[12p-P17-6] Optical and structural properties of Si_xC_1-x alloy thin films prepared by RF magnetron sputtering

〇(M1)Atsuki Kusunoki¹, Hiroki Hara¹, Hiroshi Katsumata¹ (1.Meiji Univ.)

Keywords:SiC,sputtering,alloy