Temperature-Tolerant Electret Material for MEMS Vibrational Energy Harvester

Hiroyuki Mitsuya

Presentation information

Oral Session

E. Energy Science and Technologies » [E-4] Progress and Prospect of Energy Harvesting Materials

[E4-O6] Slot 06

Wed. Dec 15, 2021 9:00 AM - 11:00 AM Room H (G420)

Chair: Yoshiaki Nakamura (Osaka University, Japan)

9:00 AM - 9:30 AM

[E4-O6-01 (Symposium Invited)] Temperature-Tolerant Electret Material for MEMS Vibrational Energy Harvester

*Hiroyuki Mitsuya¹, Hisayuki Ashizawa¹, Noriko Shimomura¹, Takuma Ishiguro¹, Hiroaki Honma², Gen Hashiguchi³, Hiroshi Toshiyoshi² (1. Saginomiya seisakusho, Inc. (Japan), 2. The Univ. of Tokyo (Japan), 3. Shizuoka Univ. (Japan))

Keywords:MEMS, Energy Harvester, Electret, Temperature-Tolerant, Vacuum Package

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