Materials Research Meeting 2021

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Oral Session

F. Zero Emission Technologies » [F-4] Separation Technology for Furture Energy and Global Enviromental Preservation

[F4-O7] Slot 07

Wed. Dec 15, 2021 2:30 PM - 6:00 PM Room O (G316)

Chair: Hiroshi Uyama, Masaaki Kitajima

5:30 PM - 6:00 PM

[F4-O7-06] SiC microphone as sensor for gas leak detection in harsh environment

*Azrul Azlan Hamzah1, Siti Aisyah Zawawi1, Faisal Mohd-Yasin2, Burhanuddin Yeop Majlis1 (1. Universiti Kebangsaan Malaysia (Malaysia), 2. Griffith University (Australia))

Keywords:Silicon carbide, Microphone, Gas leak detection, Harsh environment, MEMS, High temperature

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