Irradiation Techniques and Conditions of the 200 kV Ion-implanter at WERC

Presentation information

Oral Session

H. Innovative Materials Processing for Sustainable Society » [H-5] Innovative Material Technologies Utilizing Ion Beams

Thu. Dec 16, 2021 4:00 PM - 6:05 PM Room H (G420)

Chair: Setsuo Nakao (National Institute of Advanced Industrial Science and Technology), Kohtaku Suzuki (The Wakasa Wan Energy Research Center)

4:50 PM - 5:10 PM

*Kohtaku Suzuki¹, Yoshinori Nakata¹, Kinji Uda¹ (1. The Wakasa Wan Energy Research Center (Japan))

Keywords:Ion implanter, Ion irradiation, High current

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