ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Th-P] Poster Presentation

2019年10月3日(木) 13:45 〜 15:45 Annex Hall 1 (Kyoto International Conference Center)

13:45 〜 15:45

[Th-P-12] Defect Characterization in 100 mm commercial 4H-SiC Substrate and Homoepitaxial Wafer

*Long Yang1,2, Lixia Zhao1,2, Huiwang Wu1,2, Yafei Liu3, Balaji Raghothamachar3, Michael Dudley3 (1. Hebei Key Lab. of New Semiconductor Materials(China), 2. Hebei Poshing Electronics Tech. Corp. Ltd.(China), 3. Stony Brook Univ.(United States of America))