ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

2019年10月1日(火) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[Tu-P-18] Crystalline quality evaluation of SiC p/n column layers formed by trench-filling-epitaxial growth

*Kohei Adachi1,2, Ryoji Kosugi1, Shiyang Ji1, Yasuyuki Kawada1,3, Hiroyuki Fujisawa1,3, Shingo Tomohisa2, Naruhisa Miura2, Yoshiyuki Yonezawa1, Hajime Okumura1 (1. National Institute of Advanced Industrial Science and Technology(Japan), 2. Mitsubishi Electric Corp.(Japan), 3. Fuji Electric Co., Ltd.(Japan))