[17p-Z16-1~8] 7.2 電子ビーム応用

[17p-Z16-5] Inelastic Scattering Processes in Quantum Electron Microscopy

〇Hiroshi Okamoto¹、Vahid Sazgari²、Ismet Kaya² (1.Akita Prefectural University、2.Sabanci University)

キーワード：Quantum electron microscopy

In recent years, the necessity of low dose imaging of beam-sensitive specimens is on the rise, not only in biological sciences but also in material sciences in electron microscopy. One potential candidate to address this problem is quantum electron microscopy (QEM). In this talk, we review what QEM is; and propose a method of mitigating the effect of inelastic electron scattering, which would limit the performance of QEM itself.