2021年第68回応用物理学会春季学術講演会

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[19p-P02-1~22] 17 ナノカーボン(ポスター)

2021年3月19日(金) 14:00 〜 14:50 P02 (ポスター)

14:00 〜 14:50

[19p-P02-4] Influence of carbon source decomposition process to CNT growth from carbon solid seeds at high temperature

〇(DC)Mengyue Wang1、Michiharu Arifuku2、Noriko Kiyoyanagi2、Masamitsu Satake2、Taiki Inoue1、Yoshihiro Kobayashi1 (1.Osaka Univ.、2.Nippon Kayaku)

キーワード:carbon feedstock decomposition

As one of factors proved to influence the formation of carbon nanotube (CNT) structure in chemical vapor deposition (CVD) system, the carbon source decomposition reactions happened in gas-phase has gained more attention recently. Among various intermediates got from carbon source pyrolysis process, C2 and C4 species has been recognized key products to enhance CNT growth efficiency. In our previous work, through the usage of two-stage growth method with the injection of etchants (water vapor or carbon dioxide), the yield of high-quality CNT has been improved by the further comprehending about growth driving force and the etching effects of growth enhancer. Nevertheless, thinking about the significant influence of carbon feedstock constituent, as the first part of CVD progress, the pyrolysis process still needs efforts to illustrate and find out the crucial intermediates for promoting CNT growth. In this work, we focused on analyzing the difference of CNT growth results caused by using different carbon feedstock, C2H2 and C2H4. Based on this, the influence of gas-phase pyrolysis behavior to CNT growth at high temperature will be studied.