[CFP6J] Applied Metrology and Sensing

[CFP6J-04] Scatterometry using deep learning for analysis of oil including phosphor

*Tetsuya Hoshino¹, Shintaro Narioka¹, Sadao Aoki¹, Masahide Itoh¹, Masami Kobayashi² (1. Inst. of Applied Physics., University of Tsukuba (Japan), 2. Inst. of Materials Science., University of Tsukuba (Japan))

[Presentation Style] Onsite

Deep learning was introduced to the scatterometry of isolated particles. We applied this method to oil droplets containing phosphors and analyzed the relationship between the amount of phosphor and the emission intensity.