Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Dong Ju Choi

Presentation information

Oral Session

CLEO-PR2022 » Micro/Nano Optical Sensors

[CThA17D] Micro/Nano Optical Sensors

Thu. Aug 4, 2022 11:00 AM - 12:00 PM Room 104&105 (1F)

Session Chairs: Keiichiro Kagawa (Shizuoka Univ.), Norimichi Tsumura (Chiba Univ.)

11:15 AM - 11:30 AM

[CThA17D-02] Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

*Dong Ju Choi¹, Sangwoo Nam¹, Dong Uk Kim¹, Young Jae Park¹, Man Jae Her¹, Min Gi Im¹, Myung Seok Hong¹, Hyeju Song¹, Jaesok Yu¹, Sangyoon Han¹ (1. DGIST (Korea))

[Presentation Style] Onsite

We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively.