ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

2019年9月30日(月) 15:45 〜 17:45 Annex Hall 1 (Kyoto International Conference Center)

15:45 〜 17:45

[Mo-P-09] High etching rate photo-electrochemical CARE (catalyst referred etching) of SiC by a potential control of catalyst surface

*Ryosuke Ohnishi1, Daisetsu Toh1, Hideka Kida1, Satoshi Matsuyama1, Yasuhisa Sano1, Kazuto Yamauchi1,2 (1. Department of Precision Sci. and Tech., Graduate School of Eng., Osaka Univ.(Japan), 2. Res. Center of Ultra-Precision Sci. and Tech., Graduate School of Eng., Osaka Univ.(Japan))