ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

Mon. Sep 30, 2019 3:45 PM - 5:45 PM Annex Hall 1 (Kyoto International Conference Center)

3:45 PM - 5:45 PM

[Mo-P-40] The IMOSFET: A Deeply-Scaled, Fully-Self-Aligned Trench MOSFET

Madankumar Sampath3, *James A Cooper1, Arash Salemi2, Dallas T. Morisette3 (1. Sonrisa Research, Inc. and Purdue Univ.(United States of America), 2. Ohio State Univ.(United States of America), 3. Purdue Univ.(United States of America))