[Th-P] Poster Presentation

[Th-P-07] Resistive heater element made of highly durable TaC-coated graphite for high-temperature and highly corrosive processes: Application to MOCVD GaN epitaxial growth

*Daisuke Nakamura¹, Tetsuo Narita¹, Taishi Kimura¹ (1. Toyota central R&D labs., inc.(Japan))