ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

2019年10月1日(火) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[Tu-P-29] Phosphorous Ion Implantation for 4H-SiC DMOSFETs Source/Drain

*Roberta Nipoti1, Antonella Parsini2, Virginia Boldrini1, Salvatore Vantaggio2, Marco Gorni2, Maria Concetta Canino1, Michele Bellettato1, Massimo Camarda3, Judith Woerle3, Ulrike Grossner4 (1. CNR-IMM unit of Bologna(Italy), 2. Univ. of Parma, DMPCS - CNISM(Italy), 3. PSI, Villigen(Switzerland), 4. ETH Zurich, APS(Switzerland))