ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

2019年10月1日(火) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[Tu-P-31] Ohmic contact mechanism of Ni contact to C-faced 4H-n-SiC substrate

*Seongjun Kim1, Minwho Lim2, Hong-Ki Kim1, Min-Jae Kang1, Hahye Choi1, Nam-Suk Lee1, Tobias Erlbacher2, Anton Bauer2, Hoon-Kyu Shin1 (1. Pohang Univ. of Sci. and Tech.(Korea), 2. Fraunhofer Inst. for Integrated Systems and Device Tech. (IISB)(Germany))