[We-P] Poster Presentation

[We-P-01] Crystal separation method of 6-inch 4H-SiC crystal using the enhanced adhesive contraction

*Jonghwi Park¹, Byung-Kyu Jang¹, Jung-Woo Choi¹, Eunsu Yang¹, Jung-Gyu Kim¹, Sang-Ki Ko¹, Myung-Ok Kyun¹, Kap-Ryeol Ku¹, Dae-Sung Kim², WON JAE LEE² (1. SKC(Korea), 2. Dongeui Univ.(Korea))