ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[We-P] Poster Presentation

2019年10月2日(水) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[We-P-27] Characterization of Surface Potential of Oxidized Silicon Carbide by a Laser Terahertz Emission Microscope

*Tatsuhiko Nishimura1, Hidetoshi Nakanishi1, Iwao Kawayama2, Masayoshi Tonouchi2, Takuji Hosoi3, Takayoshi Shimura3, Heiji Watanabe3 (1. SCREEN Holdings Co., Ltd.(Japan), 2. Inst. of Laser Eng., Osaka Univ.(Japan), 3. Graduate School of Eng., Osaka Univ.(Japan))