ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[We-P] Poster Presentation

Wed. Oct 2, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[We-P-33] Room Temperature Processing of Low Resistance Contacts to p-type 4H-SiC using Laser Doping

Kento Okamoto1, *Akihiro Ikeda2, Toshifumi Kikuchi1, Hiroshi Ikenoue1, Tanemasa Asano1 (1. Kyushu Univ.(Japan), 2. Sojo Univ.(Japan))