The 60th JSAP Spring Meeting,2013

Sessions

08. Plasma Electronics » 8.4 Plasma etching

Regular sessions(Oral presentation)

[27p-A3-1~17] 8.4 Plasma etching

Wed. Mar 27, 2013 1:30 PM - 6:00 PM A3 (K1 2F-201)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

Regular sessions(Oral presentation)

[28a-A5-1~6] 8.4 Plasma etching

Thu. Mar 28, 2013 9:15 AM - 10:45 AM A5 (K1 3F-303)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

Tomohiro Kubota1,2, Kazuhiro Miwa2, Altansukh Batnasan1, Shingo Otsuka3, Naoki Watanabe3, Takuya Iwasaki3, Yasuroh Iriye3, Kohei Ono3, Masakazu Sugiyama2,4, Seiji Samukawa1,2,5 (IFS, Tohoku Univ.1, BEANS2, Mizuho I&R Inst.3, Univ. of Tokyo4, WPI-AIMR, Tohoku Univ.5)

Shunsuke Mochizuki1, Naoki Watanabe2, Shingo Ohtsuka2, Takuya Iwasaki2, Kohei Ono2, Yasuroh Iriye2, Kazuhiro Miwa3, Tomohiro Kubota3,4, Masakazu Sugiyama3,5, Seiji Samukawa3,4 (Mathematical Systems Inc.1, Mizuho Information & Research Institute Inc.2, BEANS Project3, Tohoku Univ.4, Univ. of Tokyo5)