Tomoki Oku

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 5:00 PM - 5:50 PM P12 (Poster)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-P12-1~4] 13.3 Insulator technology

5:00 PM - 5:50 PM

[16p-P12-1] Dependence of penetration barrier of alkali metal ions into SiNx and SiOx films on ion radius

〇Tomoki Oku¹, Masahiro Totsuka¹, Hajime Sasaki¹ (1.Mitsubishi Electric)