9:00 AM - 9:15 AM [18a-Z05-1] Conversion from Immobile Basal Plane Dislocations to Mobile Combinations of Partial Dislocations during Epitaxial Growth of 4H-SiC 〇Johji Nishio1, Chiharu Ota1, Ryosuke Iijima1 (1.Toshiba Corp.)