Cuong Van Vuong

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z05 (Z05)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18a-Z05-1~11] 15.6 Group IV Compound Semiconductors (SiC)

11:00 AM - 11:15 AM

▲ [18a-Z05-8] Improve High-Temperature Reliability at 500℃ of Ni/Nb/4H-SiC Ohmic Contact
with CF₄:O₂ Surface Treatment

〇Cuong Van Vuong¹, Seiji Ishikawa^1,2, Tomonori Maeda^1,2, Hiroshi Sezaki^1,2, Tetsuya Meguro¹, Tadashi Sato¹, Shin-Ichiro Kuroki¹ (1.Research Institute for Nanodevice and Bio Systems, Hiroshima University, 2.Phenitec Semiconductor Corp)