Tetsuo Harada

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 2:30 PM - 6:35 PM Z03 (Z03)

Symposium (Oral)
| Symposium
| Progresses and future on EUV and soft x-ray imaging techniques

[18p-Z03-1~10] Progresses and future on EUV and soft x-ray imaging techniques

5:05 PM - 5:20 PM

[18p-Z03-7] EUV mask observation by coherent EUV scatterometry microscope

〇Tetsuo Harada¹, Takeo Watanabe¹ (1.Univ. of Hyogo)