Keisuke Yasuta

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 6:00 PM Z33 (Z33)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-Z33-1~16] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

2:30 PM - 2:45 PM

△ [19p-Z33-5] Thermal stability of resistance of ion-implanted amorphous-InGaZnO film

〇Keisuke Yasuta¹, Toshimasa Ui¹, Junichi Tatemichi¹ (1.NISSIN ION EQUIPMENT)