The 68th JSAP Spring Meeting 2021

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Kosuke Takenaka(Osaka Univ.), Keigo Takeda(Meijo Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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