- Oral presentation
- | 13 Semiconductors
- | 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
Tue. Mar 16, 2021 1:30 PM - 4:15 PM Z25 (Z25)
Nobuya Mori(Osaka Univ.), Takashi Hasunuma(Univ. of Tsukuba)
Sessions
Oral presentation
203 results (131 - 140)
- Oral presentation
- | 13 Semiconductors
- | 13.2 Exploratory Materials, Physical Properties, Devices
Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z23 (Z23)
Haruhiko Udono(Ibaraki Univ.), Kenji Yamaguchi(QST)
- Oral presentation
- | 13 Semiconductors
- | 13.2 Exploratory Materials, Physical Properties, Devices
Tue. Mar 16, 2021 1:30 PM - 4:15 PM Z23 (Z23)
Takashi Suemasu(Univ. of Tsukuba), Kosuke Hara(Univ. of Yamanashi)
- Oral presentation
- | 13 Semiconductors
- | 13.3 Insulator technology
Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)
Shinichi Takagi(Univ. of Tokyo)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)
Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)
Hitoshi Habuka(Yokohama Natl. Univ.), Yan Wu(Nihon Univ.)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)
Kuniyuki Kakushima(Tokyo Tech), Masato Sone(Tokyo Tech)
- Oral presentation
- | 13 Semiconductors
- | 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z26 (Z26)
Hiroshi Inokawa(Shizuoka Univ.), Takahiro Mori(AIST)
- Oral presentation
- | 13 Semiconductors
- | 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Wed. Mar 17, 2021 9:00 AM - 11:15 AM Z26 (Z26)
Takao Marukame(Toshiba)
- Oral presentation
- | 13 Semiconductors
- | 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)
Kazuhiko Endo(AIST), Kimihiko Kato(AIST)