- Oral presentation
- | 6 Thin Films and Surfaces
- | 6.5 Surface Physics, Vacuum
Wed. Mar 17, 2021 9:45 AM - 12:00 PM Z06 (Z06)
Kei Mitsuhara(Ritsumeikan Univ.)
Sessions
Oral presentation
203 results (71 - 80)
- Oral presentation
- | 6 Thin Films and Surfaces
- | 6.6 Probe Microscopy
Tue. Mar 16, 2021 10:00 AM - 11:45 AM Z15 (Z15)
Yoichi Otsuka(Osaka Univ.)
- Oral presentation
- | 6 Thin Films and Surfaces
- | 6.6 Probe Microscopy
Tue. Mar 16, 2021 1:30 PM - 5:15 PM Z15 (Z15)
Yoshiaki Sugimoto(Univ. of Tokyo), Toru Utsunomiya(Kyoto Univ.)
- Oral presentation
- | 7 Beam Technology and Nanofabrication
- | 7.1 X-ray technologies
Thu. Mar 18, 2021 9:00 AM - 12:15 PM Z14 (Z14)
Akira Sasaki(QST), Mitsunori Toyoda(Tokyo Polytechnic Univ.)
- Oral presentation
- | 7 Beam Technology and Nanofabrication
- | 7.1 X-ray technologies
Thu. Mar 18, 2021 1:15 PM - 2:15 PM Z14 (Z14)
Toshihide Tsuru(Yamagata Univ.)
- Oral presentation
- | 7 Beam Technology and Nanofabrication
- | 7.2 Applications and technologies of electron beams
Wed. Mar 17, 2021 1:30 PM - 3:30 PM Z16 (Z16)
Takashi Kawakubo(Natl. Inst. of Tech., Kagawa College), Takafumi Ishida(Nagoya University)
- Oral presentation
- | 7 Beam Technology and Nanofabrication
- | 7.3 Micro/Nano patterning and fabrication
Thu. Mar 18, 2021 9:00 AM - 11:15 AM Z16 (Z16)
Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)
- Oral presentation
- | 8 Plasma Electronics
- | 8.1 Plasma production and diagnostics
Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)
Hiroshi Akatsuka(Tokyo Tech), Kentaro Tomita(Hokkaido Univ.), Manabu Tanaka(Kyushu Univ.)
- Oral presentation
- | 8 Plasma Electronics
- | 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z03 (Z03)
Hisataka Hayashi(KIOXIA), Tomoko Ito(阪大)
- Oral presentation
- | 8 Plasma Electronics
- | 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)
Kosuke Takenaka(Osaka Univ.), Keigo Takeda(Meijo Univ.)