[16a-Z10-1~10] 3.15 Silicon photonics and integrated photonics

[16a-Z10-6] Investigation of SiN_x optical waveguides on bulk Si substrate (2)

〇Rui Tsuchiya¹, Ryota Oyamada¹, Yasuhiko Ishikawa¹ (1.Toyohashi Univ. Tech.)

Keywords:SiNx, Reactive Sputtering, Optical Waveguide

SiN_x deposited by reactive sputtering was evaluated by infrared absorption and refractive index spectra. SiN_x shows a negligible amount of N-H bonds in the film and an almost stoichiometric composition. The thermo-optic coefficient is estimated to be 3×10^-5 K^-1, which is almost one order of magnitude smaller than that of Si.