[16a-Z10-1~10] 3.15 シリコンフォトニクス・集積フォトニクス

▼ [16a-Z10-8] Compact suspended complex Si MS-SW BG sensor for higher-sensitivity refractive index sensing

〇(D)Siim Heinsalu¹、Anna Kawano¹、Yushi Isogai¹、Yuichi Ishikawa¹、Hiroshi Ishikawa¹、Katsuyuki Utaka¹ (1.Waseda Univeristy)

キーワード：Sensors, Bragg grating, SOI

One of the most simplistic semiconductors sensing devices are Bragg gratings (BG), however the typical lengths for traditional BG are in the order of few hundred micrometers [1]. To make the BG sensor shorter it is necessary to make each period more sensitive for the surrounding medium. A promising configuration for high sensitivity is combination of multiple slots and sub wavelength (MS-SW) [2]. It has been shown that making the BG suspended sensitivity is also increased [3]. In the following study we combined both to MS-SW BG and suspended BG to improve the sensitivity. To keep the sensor compact we limit period count to 20.