[16a-Z10-1~10] 3.15 Silicon photonics and integrated photonics

[16a-Z10-9] High Q-factor Si microdisk resonators in the mid-infrared

〇takuma miyake^1,3, xuejun xu¹, kentaro sawano³, takuya maruizumi³, tawara takehiko^1,2, gotoh hideki¹ (1.NTT BRL, 2.NTT NPC, 3.TCU)

Keywords:optical sensing, waveguide

We have demonstrated high-Q Si microdisk resonators with Q-factor on the order of 10⁴ in the mid-infrared wavelength range (3.27 µm) on SOI substrate with thin Si layer (220 nm), which is gas sensing.