Characterization and optimization of planar-type uni-leg silicon thermoelectric generator

Ryoto Yanagisawa; Patrick Ruther; Oliver Paul; Masahiro Nomura

Presentation information

Oral presentation

22 Joint Session M "Phonon Engineering" » 22.1 Joint Session M "Phonon Engineering"

[16p-Z32-1~16] 22.1 Joint Session M "Phonon Engineering"

Tue. Mar 16, 2021 1:30 PM - 6:00 PM Z32 (Z32)

Takanobu Watanabe(Waseda Univ.), Junichiro Shiomi(Univ. of Tokyo), Koji Miyazaki(Kyushu Inst. of Tech.)

2:30 PM - 2:45 PM

[16p-Z32-5] Characterization and optimization of planar-type uni-leg silicon thermoelectric generator

〇Ryoto Yanagisawa¹, Patrick Ruther², Oliver Paul², Masahiro Nomura¹ (1.IIS Univ. of Tokyo, 2.IMTEK U. Freiburg)

Keywords:thermoelectrics, silicon, energy harvest

We fabricated planar-type uni-leg silicon thermoelectric generator with nano-structured silicon membrane. We measured resistance and thermopower of device with different membrane width and length, and found that optimal width and length are determinded by relation between resistance and area for width and relation between thermopower and resistance for length respectively.