[16p-Z32-1~16] 22.1 Joint Session M "Phonon Engineering"

△ [16p-Z32-6] Development of planar-type uni-leg silicon thermoelectric generator with cap structure

〇Ryoto Yanagisawa¹, Patrick Ruther², Oliver Paul², Masahiro Nomura¹ (1.IIS Univ. of Tokyo, 2.IMTEK U. Freiburg)

Keywords:thermoelectrics, silicon, energy harvest

We fabricated a planar-type uni-leg silicon thermoelectric generator with nano-structured silicon membranes. We also fabricated the cap structure on top of the thermoelectric generator to improve thermal design of the device. We measured thermoelectric voltage as a function of the temperature of the hot-plate on which the device is attached while changing wind speed for the cold side. We observed 88 uV for 1 K temperature difference between the top and bottom surfaces and achieved 1 uW output power per square centimeter area.