[17a-Z10-1~10] 3.15 Silicon photonics and integrated photonics

[17a-Z10-1] Design and fabrication of waveguide for optical phase shifter using μc-Si:H

〇(M2)Yukinobu Nakajima¹, Yuya Shoji¹, Ryohei Takei², Tetsuya Mizumoto¹, Toshihiro Kamei² (1.Tokyo Tech, 2.AIST)

Keywords:silicon photonics, optical phase shifter

In order to realize an on-chip optical interconnect, it is effective to integrate optical wiring three-dimensionally on LSI at the end-process, but the production temperature is limited. In this study, we suggest optical phase shifter using microcrystalline silicon that can be deposited at low temperature. We design and fabricate waveguide that has a layered pin junction instead of conventional horizonal pin junction to use microcrystalline silicon feature that can be doped at the same time as deposition and has a trench to separate the light distribution from the upper electrode.