[17p-Z11-1~6] Forefront and prospects of ion beam analysis

[17p-Z11-3] Three dimensional analysis of hydrogen distribution in an aluminum substrate using
transmission ERDA

〇Shigeo Tomita¹, Akiyoshi Yamazaki², Satoshi Ishii², Kimikazu Sasa^1,2, Masao Sataka², Hiroshi Naramoto², Hiroshi Kudo² (1.Pure Appl. Sci, Univ. of Tsukuba, 2.UTTAC, Univ. of Tsukuba)

Keywords:Elastic Recoil Detection Analysis, Ion Beam Materials Analysis, Hydrogen Analysis

We have developed a three-dimensional measurement system of Hydrogen distribution in a substrate, which is based on a transmission ERDA combined with the microbeam system of Oxford Microbeams. The experiments were performed with the 6 MV tandem accelerator of University of Tsukuba. We report measured microscopic 3-dimensional distribution of plasma-charged hydrogen in polycrystalline Al.