The 68th JSAP Spring Meeting 2021

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[17p-Z16-1~8] 7.2 Applications and technologies of electron beams

Wed. Mar 17, 2021 1:30 PM - 3:30 PM Z16 (Z16)

Takashi Kawakubo(Natl. Inst. of Tech., Kagawa College), Takafumi Ishida(Nagoya University)

2:30 PM - 2:45 PM

[17p-Z16-5] Inelastic Scattering Processes in Quantum Electron Microscopy

Hiroshi Okamoto1, Vahid Sazgari2, Ismet Kaya2 (1.Akita Prefectural University, 2.Sabanci University)

Keywords:Quantum electron microscopy

In recent years, the necessity of low dose imaging of beam-sensitive specimens is on the rise, not only in biological sciences but also in material sciences in electron microscopy. One potential candidate to address this problem is quantum electron microscopy (QEM). In this talk, we review what QEM is; and propose a method of mitigating the effect of inelastic electron scattering, which would limit the performance of QEM itself.