1:30 PM - 1:45 PM
[17p-Z26-1] The 12th Silicon Technology Division Paper Award・Young Resercher Award
Keywords:silicon, award ceremony
Presentation information
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)
Kazuhiko Endo(AIST), Kimihiko Kato(AIST)