The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[17p-Z28-1~14] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z28 (Z28)

Nobuhiko Ozaki(Wakayama Univ.), Toshiyuki Kaizu(Kobe Univ.), Yoriko Tominaga(Hiroshima Univ.), Kentaro Onabe

5:45 PM - 6:00 PM

[17p-Z28-14] Fabrication of GaAs microlenses using physical polishing

〇Taisuke Kokudo1, Hiroki Kikui2, Daichi Oka2, Satoshi Shimomura2 (1.Ehime college, 2.Ehime Univ.)

Keywords:semiconductor, GaAs, microlenses