[18a-Z33-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18a-Z33-1] Transformation from degenerate to non-degenerate Sn-doped In₂O₃ films by postirradaition of O^- ions

〇Yutaka Furubayashi¹, Makoto Maehara², Toshiyuki Sakemi², Hisashi Kitami^1,2, Tetsuya Yamamoto¹ (1.Kochi Univ. Tech., 2.Sumitomo Heavy Industr. ltd.)

Keywords:Indium oxide, post-irradiation of negatively-charged oxygen ions, optical properties

Sn-doped In2O3 (ITO) is mainly applied to transparent conducting oxides. In this study, we successfully demonstrated that the carrier concentration of ITO filmes irradiated by negatively-charged oxygen ions became very low, where it showed non-degenerate semiconducting properties which are quite different from those of non-irradiated ITO ones.