Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O<sub>2</sub> Plasma

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Hiroshi Akatsuka(Tokyo Tech), Kentaro Tomita(Hokkaido Univ.), Manabu Tanaka(Kyushu Univ.)

4:15 PM - 4:30 PM

〇(M1)Tomohiro Ogasawara¹, Yuki Iwata¹, Haruka Suzuki¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.NIFS)

Keywords:atmospheric pressure plasma