Formation of high-aspect-ratio Si nanocone using intermediate pressure hydrogen plasma

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

Fri. Mar 19, 2021 10:00 AM - 12:00 PM Z17 (Z17)

Takeshi Kitajima(National Defence Academy)

10:15 AM - 10:30 AM

〇Toshimitsu Nomura¹, Kenta Kimoto¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹, Hiromasa Ohmi¹ (1.Osaka Univ.)

Keywords:hydrogen plasma, high pressure plasma, nanostructure