[19p-Z22-1~16] 3.13 Semiconductor optical devices

[19p-Z22-11] Design and Fabrication of Low-Voltage Single Microring Resonator-Loaded Mach–Zehnder Optical Modulator

〇Yasuaki Tsuruta¹, Satoshi Ohtsuka¹, Yasuo Kokubun², Taro Arakawa¹ (1.Yokohama Nat. Univ., 2.Chubu Univ.)

Keywords:Mach-Zehnder modulator, microring resonator, quantum well

We demonstrate low-voltage single microring resonator-loaded Mach-Zehnder optical modulators with newly designed multiple Five-layer Asymmetric Coupled Quantum Well (FACQW) which is optimized to the non-uniform electric field applied to the core layer. The product of half-wavelength voltage and phase shifter length (V_piL) is 0.022 V cm.