Oral presentation

[20p-A106-1~1] 8.7 Plasma Electronics Invited Talk

Tue. Sep 20, 2022 1:00 PM - 1:45 PM A106 (A106)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

1:00 PM - 1:45 PM

▲ [20p-A106-1] [INVITED] Analysis of two-dimensional RF sheath dynamics in capacitively coupled Ar plasmas using a high-performance particle-in-cell simulation

〇Hae June Lee¹ (1.Pusan National Univ.)

Oral presentation

Wed. Sep 21, 2022 10:15 AM - 11:00 AM B200 (B200)

Masanaga Fukasawa(Sony Semiconductor Solutions)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

10:15 AM - 11:00 AM

〇Sumie Segawa¹ (1.Tokyo Electron Limited)

Oral presentation

Thu. Sep 22, 2022 3:30 PM - 4:15 PM A404 (A404)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

3:30 PM - 4:15 PM

〇Annemie Bogaerts¹ (1.UAntwerp)